94c66b1066643f38da2300d3b7e1810ee1db519c1f3537c6a7de4df9478683f3af8fd619a06f8c8f2ab494b7b6f5b6f5de3f609e51ea602c4f0f0f343b2a36fc sha512 1035 mac/de/firefox-51.0.checksums